Automated alignment of aspheric and freeform surfaces in a non-null test interferometer

Goran Baer; Eugenio Garbusi; Wolfram Lyda; Christof Pruss; Wolfgang Osten

doi:10.1117/12.895010

26 May 2011 Automated alignment of aspheric and freeform surfaces in a non-null test interferometer

Goran Baer, Eugenio Garbusi, Wolfram Lyda, Christof Pruss, Wolfgang Osten

Proceedings Volume 8082, Optical Measurement Systems for Industrial Inspection VII; 80821L (2011) https://doi.org/10.1117/12.895010
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

An automatic method for the positioning of a test surface in a non-null interferometer is presented. If the test surface is positioned incorrectly with respect to the test beam this leads to aberrations, which distort the measurement of the surface. A central issue in the interferometric characterization of surfaces is to avoid aberrations due to an incorrect placement of the test surface. In case of spherical and plane surfaces these errors can usually be distinguished from the surface figure errors and are eliminated in post processing. For aspheric and free-form surfaces this task is no longer trivial. Therefore it is important to minimize the alignment error of the surface. In this work the effect on the measured phase due to lateral and axial displacements of the aspheric surface is calculated and an adjustment method for the positioning of the surface at a predefined measurement location is presented. Experimental results showing the feasibility of the proposed procedure are presented.

Citation Download Citation

Goran Baer, Eugenio Garbusi, Wolfram Lyda, Christof Pruss, and Wolfgang Osten "Automated alignment of aspheric and freeform surfaces in a non-null test interferometer", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80821L (26 May 2011); https://doi.org/10.1117/12.895010

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