Determining parametric TIS behavior from optical fabrication metrology data

James E. Harvey; Sven Shröder; Narak Choi; Angela Duparré

doi:10.1117/12.894571

27 September 2011 Determining parametric TIS behavior from optical fabrication metrology data

James E. Harvey, Sven Shröder, Narak Choi, Angela Duparré

Proceedings Volume 8126, Optical Manufacturing and Testing IX; 81260X (2011) https://doi.org/10.1117/12.894571
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

Optical manufacturers often have to deal with a specification on the total integrated scatter (TIS) or "Haze" from a given mirror surface. It is frequently thought that TIS or BRDF measurements are required to assure compliance with these specifications. TIS is determined by the spatial frequency banded-limited "relevant" rms surface roughness, the wavelength of light and the angle of incidence. For short-wavelength (EUV/X-ray) applications, even state-of-the-art optical surfaces can scatter a significant fraction of the total reflected light. In this paper we show that the TIS can be accurately predicted, even for moderately rough surfaces, directly from the surface metrology data. We present parametric plots of the TIS for optical surfaces with arbitrary roughness, surface correlation widths and incident angles. Surfaces with both Gaussian and ABC or K-correlation power spectral density (PSD) functions have been modeled. These parametric TIS predictions provide insight and understanding regarding optical fabrication tolerances necessary to satisfy specific optical performance requirements.

Citation Download Citation

James E. Harvey, Sven Shröder, Narak Choi, and Angela Duparré "Determining parametric TIS behavior from optical fabrication metrology data", Proc. SPIE 8126, Optical Manufacturing and Testing IX, 81260X (27 September 2011); https://doi.org/10.1117/12.894571

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KEYWORDS

Spatial frequencies

Surface roughness

Optical fabrication

Metrology

Scattering

Surface finishing

Tolerancing

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