A Proven, Industrial Magnetron Sputtering System With Excellent Expansion And Scale-Up Capabilities

D. Griffin

doi:10.1117/12.941863

12 November 1987 A Proven, Industrial Magnetron Sputtering System With Excellent Expansion And Scale-Up Capabilities

D. Griffin

Proceedings Volume 0823, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion VI; (1987) https://doi.org/10.1117/12.941863
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

Airco Solar Products began as a business unit of Airco Temescal in the early 1970's. The first large area magnetron sputtering deposition occurred in 1974, and the first large area magnetron sputtering system was built and operated under contract to Guardian Industries in Carleton, Michigan in 1977, and was later sold to Guardian. This system continues in three-shift production today. A smaller development system, designed for use in the architectural glass coating industry, was introduced in parallel with the large area coaters. There are now over seventeen of these systems, called the ILS-1600, in use or on order throughout the world. This is a proven, industrial-style development sputter deposition system and has an excellent field record in the areas of versatility and low maintenance requirements. Airco Solar Products has recently begun to market this system into other applications such as the photovoltaics industry, the flat panel display industry and other specialty industries. The features of this system such as overall design, expandability, process scale-up and available options will be discussed. Expanded versions of this system currently in the field will be reviewed, and future applications will be discussed.

Citation Download Citation

D. Griffin "A Proven, Industrial Magnetron Sputtering System With Excellent Expansion And Scale-Up Capabilities", Proc. SPIE 0823, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion VI, (12 November 1987); https://doi.org/10.1117/12.941863

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available