Pattern matching for double patterning technology-compliant physical design flows

Lynn T.-N. Wang; Vito Dai; Luigi Capodieci

doi:10.1117/12.916581

14 March 2012 Pattern matching for double patterning technology-compliant physical design flows

Lynn T.-N. Wang, Vito Dai, Luigi Capodieci

Proceedings Volume 8327, Design for Manufacturability through Design-Process Integration VI; 832708 (2012) https://doi.org/10.1117/12.916581
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

A pattern-based methodology for guiding the generation of DPT-compliant layouts using a foundry-characterized library of "difficult to decompose" patterns with known corresponding solutions is presented. A pattern matching engine scans the drawn layout for patterns from the pattern library. If a match were found, one or more DPT-compliant solutions would be provided for guiding the layout modifications. This methodology is demonstrated on a sample 1.8 mm² layout migrated from a previous technology. A small library of 12 patterns is captured, which accounts for 59 out of the 194 DPT-compliance check violations examined. In addition, the methodology can be used to recommend specific changes to the original drawn design to improve manufacturability. This methodology is compatible with any physical design flows that use automated decomposition algorithms.

Citation Download Citation

Lynn T.-N. Wang, Vito Dai, and Luigi Capodieci "Pattern matching for double patterning technology-compliant physical design flows", Proc. SPIE 8327, Design for Manufacturability through Design-Process Integration VI, 832708 (14 March 2012); https://doi.org/10.1117/12.916581

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available