Object-depending artifacts in confocal measurements

F. Mauch; W. Lyda; M. Gronle; W. Osten

doi:10.1117/12.929214

11 October 2012 Object-depending artifacts in confocal measurements

F. Mauch, W. Lyda, M. Gronle, W. Osten

Proceedings Volume 8466, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI; 846609 (2012) https://doi.org/10.1117/12.929214
Event: SPIE NanoScience + Engineering, 2012, San Diego, California, United States

Abstract

Confocal sensors are well established in optical surface metrology. Especially when measuring rough surfaces, their robustness is widely appreciated. However, it was shown lately that certain object features can produce severe artifacts in confocal measurements that are hard to identify as false measurements. Experimental evidence of these artifacts is given with a measurement of a suitable surface conducted with a chromatic confocal point sensor. Furthermore various simulations are presented that identify a self-imaging property of the surface features as the root of the artifacts. These simulations also pave the way to a more precise yet still intuitive signal model for confocal measurements.

Citation Download Citation

F. Mauch, W. Lyda, M. Gronle, and W. Osten "Object-depending artifacts in confocal measurements", Proc. SPIE 8466, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI, 846609 (11 October 2012); https://doi.org/10.1117/12.929214

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