Status of the AIMS(TM) EUV Project

Anthony D. Garetto; Jan Hendrik Peters; Sascha Perlitz; Ulrich Matejka; Dirk Hellweg; Markus R. Weiss

doi:10.1117/12.981345

8 November 2012 Status of the AIMS^(TM) EUV Project

Anthony D. Garetto, Jan Hendrik Peters, Sascha Perlitz, Ulrich Matejka, Dirk Hellweg, Markus R. Weiss

Proceedings Volume 8522, Photomask Technology 2012; 852220 (2012) https://doi.org/10.1117/12.981345
Event: SPIE Photomask Technology, 2012, Monterey, California, United States

Abstract

In previous conferences the status of the AIMS™ EUV project has been presented in which the basic layout scheme and preliminary design have been shown along with the targeted performance specification levels to be met. Presently the final design milestone of the project has been successfully completed and assembly of the prototype tool is underway. The final design concept will be presented along with the current status of the tool and simulated performance data.

Citation Download Citation

Anthony D. Garetto, Jan Hendrik Peters, Sascha Perlitz, Ulrich Matejka, Dirk Hellweg, and Markus R. Weiss "Status of the AIMS^(TM) EUV Project", Proc. SPIE 8522, Photomask Technology 2012, 852220 (8 November 2012); https://doi.org/10.1117/12.981345

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