Simulation of real-time large-scale absolute distance measurement with a pair of femtosecond frequency comb lasers

Yang Li; Qian Zhou; Kai Ni; Guanhao Wu; Xiaorui Qiao

doi:10.1117/12.999976

20 November 2012 Simulation of real-time large-scale absolute distance measurement with a pair of femtosecond frequency comb lasers

Yang Li, Qian Zhou, Kai Ni, Guanhao Wu, Xiaorui Qiao

Author Affiliations +

Proceedings Volume 8563, Optical Metrology and Inspection for Industrial Applications II; 856303 (2012) https://doi.org/10.1117/12.999976
Event: Photonics Asia, 2012, Beijing, China

Abstract

Absolute distance measurement is essential in large-scale equipment manufacturing and scientific projects. Nowadays, sophisticated equipment manufacture demands for high-precision ranging with a high speed. Several raging methods utilizing the wide spectral range and stable frequency intervals of femtosecond frequency comb laser can achieve a high precision, but most of such systems suffer from relative low speed. Fortunately, the ranging method based on a pair of femtosecond frequency comb lasers can potentially resolve such problem. Combining time-of-flight and interferometry method, the measurement can accomplish rapid raging in a measurement period of 0.2ms, and achieve higher precision by interferometry after averaging of many periods. We performed a simulation of this method in Matlab/Simulink. The precision can achieve ~10nm in ideal simulation environment. By error analysis we estimated the data processing system, and gave the appropriate parameters of detector and A/D sampling. It comes to a conclusion that detector with relative long response time of ~7nm or about can be adopted, and fast Fourier transformation (FFT) of 16384 points contributes to higher precision. With such parameters, it is possible to realize real-time raging performed on field-programmable gate array (FPGA) with high precision.

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Yang Li, Qian Zhou, Kai Ni, Guanhao Wu, and Xiaorui Qiao "Simulation of real-time large-scale absolute distance measurement with a pair of femtosecond frequency comb lasers", Proc. SPIE 8563, Optical Metrology and Inspection for Industrial Applications II, 856303 (20 November 2012); https://doi.org/10.1117/12.999976

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