Influence of irregular growth of monoatomic steps during Si/Si(001) epitaxy on generation of surface defects

Larisa V. Arapkina; Vladimir A. Yuryev

doi:10.1117/12.2017083

22 May 2013 Influence of irregular growth of monoatomic steps during Si/Si(001) epitaxy on generation of surface defects

Larisa V. Arapkina, Vladimir A. Yuryev

Author Affiliations +

Proceedings Volume 8766, Nanotechnology VI; 87660M (2013) https://doi.org/10.1117/12.2017083
Event: SPIE Microtechnologies, 2013, Grenoble, France

Abstract

We present results of STM investigation of surface of the Si epitaxial layers deposited on different Si(001) vicinal substrates at the step flow growth mode. We have observed two types of the growth defects looking like meandering or pits. The way of the defects formation does not depend on the direction of tilt of the Si(001) substrate. The formation of the defects is connected with particularities of the processes of the movement onto terraces and attachment to the step edge of Si ad-atoms during growth. We suppose that Ehrlich-Schwoebel and kink Ehrlich-Schwoebel effects drive irregular growth of the monoatomic steps during Si/Si(001) epitaxy. Process of the defect formation starts when the deep kink confined by two S_a steps appears on the step edge. Next difference between growth rate of the S_a and S_b steps results in formation of the area with other morphology.

Citation Download Citation

Larisa V. Arapkina and Vladimir A. Yuryev "Influence of irregular growth of monoatomic steps during Si/Si(001) epitaxy on generation of surface defects", Proc. SPIE 8766, Nanotechnology VI, 87660M (22 May 2013); https://doi.org/10.1117/12.2017083

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available