Surface form metrology of micro-optics

Bin Xu; Zhigang Jia; Xinghui Li; Yuan-Liu Chen; Yuki Shimizu; So Ito; Wei Gao

doi:10.1117/12.2019243

22 June 2013 Surface form metrology of micro-optics

Bin Xu, Zhigang Jia, Xinghui Li, Yuan-Liu Chen, Yuki Shimizu, So Ito, Wei Gao

Author Affiliations +

Proceedings Volume 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013); 876902 (2013) https://doi.org/10.1117/12.2019243
Event: International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 2013, Singapore, Singapore

Abstract

This keynote starts from an overview of micro-optics from fundamental functions, fabrication methods and applications in precision engineering and nanotechnology. State-of-the-art measuring systems for surface form metrology of microoptics with micro-structured surfaces, including diffractive micro-optics such as diffraction gratings and refractive micro-optics such as micro lenses and micro-lens arrays, are then be presented. The measuring systems introduced in the presentation are classified into scanning probe microscope-based systems, mechanical stylus profiling systems and optical evaluation systems. Related research activities carried out in the authors' group are also highlighted.

Citation Download Citation

Bin Xu, Zhigang Jia, Xinghui Li, Yuan-Liu Chen, Yuki Shimizu, So Ito, and Wei Gao "Surface form metrology of micro-optics", Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 876902 (22 June 2013); https://doi.org/10.1117/12.2019243

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