Paper
11 September 2013 Study on dark current of extended wavelength InGaAs detectors
Xue Li, Hengjing Tang, Tao Li, Peng Wei, Haimei Gong, Jiaxiong Fang
Author Affiliations +
Proceedings Volume 8907, International Symposium on Photoelectronic Detection and Imaging 2013: Infrared Imaging and Applications; 890703 (2013) https://doi.org/10.1117/12.2034986
Event: ISPDI 2013 - Fifth International Symposium on Photoelectronic Detection and Imaging, 2013, Beijing, China
Abstract
The short wavelength infrared (SWIR) band near 1.0-3.0μm plays an important role in many applications such as weather forecast, earth environmental or resource observation, low light level systems and astronomical observation. It is well known that InGaAs detectors can shift the cutoff wavelength from 1.7μm to 2.5μm with the higher fraction of indium in the ternary InXGa1-XAs material grown on InP, which results to material defects and poorer device characteristics due to the lattice mismatch. Dark current characteristics of extended wavelength InGaAs detectors were investigated in this paper. Dark current mechanisms for extended InGaAs detectors with different absorption layer parameters and device fabrication process were analyzed according to current-voltage curves at different temperatures and bias voltages. Activation energy of devices was extracted from current-voltage curves. Activation energy is related with absorption layer concentration and test temperature. Activation energy is the higher for the devices with the higher absorption layer concentration at lower bias voltage at the same temperature range, which shows that the narrower width of the depletion layer in the devices results to the lower generation-recombination current. The devices with the optimized etching and passivation parameters show higher thermal activation energy and the lower dark current. Dark current mechanisms of the ones are dominated by diffusion current at the higher temperature and lower bias voltage, whereas dominated by internal generation-recombination current and ohmic leakage current at the lower temperature.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xue Li, Hengjing Tang, Tao Li, Peng Wei, Haimei Gong, and Jiaxiong Fang "Study on dark current of extended wavelength InGaAs detectors", Proc. SPIE 8907, International Symposium on Photoelectronic Detection and Imaging 2013: Infrared Imaging and Applications, 890703 (11 September 2013); https://doi.org/10.1117/12.2034986
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Cited by 9 scholarly publications.
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KEYWORDS
Sensors

Indium gallium arsenide

Absorption

Plasma enhanced chemical vapor deposition

Short wave infrared radiation

Temperature metrology

Etching

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