A bi-material microbeam based thermal actuator for out-of-plane rotation

Ali Najafi Sohi; Patricia M. Nieva

doi:10.1117/12.2040728

7 March 2014 A bi-material microbeam based thermal actuator for out-of-plane rotation

Ali Najafi Sohi, Patricia M. Nieva

Proceedings Volume 8977, MOEMS and Miniaturized Systems XIII; 89770M (2014) https://doi.org/10.1117/12.2040728
Event: SPIE MOEMS-MEMS, 2014, San Francisco, California, United States

Abstract

A new design for bi-material microbeams is presented in this paper which enables the tuning of their thermal actuation response to deliver out-of-plane rotation . The design is applied to a group of 300 μm long and 20 μm wide gold-over-polysilicon microbeams with a 60 μm long top gold strip positioned in different locations along the beam length. Numerical simulation predicts that if the gold strip is situated 20 μm from one end of the microbeam, a maximum out-of- plane rotation angle of 0.9 degree can be achieved with a temperature increase of 150 °C. Thermal loading experiments carried out on fabricated similar microbeams show similar responses to those predicted by finite element simulations.

Citation Download Citation

Ali Najafi Sohi and Patricia M. Nieva "A bi-material microbeam based thermal actuator for out-of-plane rotation", Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770M (7 March 2014); https://doi.org/10.1117/12.2040728

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available