Groove profile modification of convex blazed gratings by dip (spin) coating with photoresist

Yu Cheng; Quan Liu; Jianhong Wu

doi:10.1117/12.2036521

21 December 2013 Groove profile modification of convex blazed gratings by dip (spin) coating with photoresist

Yu Cheng, Quan Liu, Jianhong Wu

Proceedings Volume 9047, 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication; 90470C (2013) https://doi.org/10.1117/12.2036521
Event: International Conference on Optical Instruments and Technology (OIT2013), 2013, Beijing, China

Abstract

The Offner-like spectrometer, one most widely used hyperspectral imaging spectrometers, offers some advantages over other spectrometers used in pushbroom imaging spectrometry: low chromatic aberrations, a compact size with low optical distortion, and large numerical aperture. The standard Offner spectrometer is made of three spherical concentric elements-- two concave mirrors and one convex grating. Convex grating is the core part of Offner type hyper-spectral imager. Considering the difficulties in fabrication of small angles convex gratings by traditional ways, we propose a new method. The ion-beam-etching holographic grating is adopted to obtain the convex blazed gratings with blazed angle of 4°--5°, whose angle can be further reduced by dipping or spinning coating with hardenable liquids. A highly reproducible blaze angle reduction to as high as a factor of 3 is achieved by controlling the spinning speed and viscosity of solution. The precise control of the blaze angles and groove profiles will be further studied focusing on the designing of rotate dip equipment and optimization of pulling speed and viscosity of solution.

Citation Download Citation

Yu Cheng, Quan Liu, and Jianhong Wu "Groove profile modification of convex blazed gratings by dip (spin) coating with photoresist", Proc. SPIE 9047, 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication, 90470C (21 December 2013); https://doi.org/10.1117/12.2036521

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available