Scanner performance predictor and optimizer in further low-k1 lithography

Hajime Aoyama; Toshiharu Nakashima; Taro Ogata; Shintaro Kudo; Naonori Kita; Junji Ikeda; Ryota Matsui; Hajime Yamamoto; Ayako Sukegawa; Katsushi Makino; Masayuki Murayama; Kazuo Masaki; Tomoyuki Matsuyama

doi:10.1117/12.2046547

31 March 2014 Scanner performance predictor and optimizer in further low-k1 lithography

Hajime Aoyama, Toshiharu Nakashima, Taro Ogata, Shintaro Kudo, Naonori Kita, Junji Ikeda, Ryota Matsui, Hajime Yamamoto, Ayako Sukegawa, Katsushi Makino, Masayuki Murayama, Kazuo Masaki, Tomoyuki Matsuyama

Author Affiliations +

Proceedings Volume 9052, Optical Microlithography XXVII; 90520A (2014) https://doi.org/10.1117/12.2046547
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

Due to the importance of errors in lithography scanners, masks, and computational lithography in low-k1 lithography, application software is used to simultaneously reduce them. We have developed “Masters” application software, which is all-inclusive term of critical dimension uniformity (CDU), optical proximity effect (OPE), overlay (OVL), lens control (LNS), tool maintenance (MNT) and source optimization for wide process window (SO), for compensation of the issues on imaging and overlay. In this paper, we describe the more accurate and comprehensive solution of OPE-Master, LNS-Master and SO-Master with functions of analysis, prediction and optimization. Since OPE-Master employed a rigorous simulation, a root cause of error in OPE matching was found out. From the analysis, we had developed an additional knob and evaluated a proof-of- concept for the improvement. Influence of thermal issues on projection optics is evaluated with a heating prediction, and an optimization with scanner knobs on an optimized source taken into account mask 3D effect for obtaining usable process window. Furthermore, we discuss a possibility of correction for reticle expansion by heating comparing calculation and measurement.

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Hajime Aoyama, Toshiharu Nakashima, Taro Ogata, Shintaro Kudo, Naonori Kita, Junji Ikeda, Ryota Matsui, Hajime Yamamoto, Ayako Sukegawa, Katsushi Makino, Masayuki Murayama, Kazuo Masaki, and Tomoyuki Matsuyama "Scanner performance predictor and optimizer in further low-k1 lithography", Proc. SPIE 9052, Optical Microlithography XXVII, 90520A (31 March 2014); https://doi.org/10.1117/12.2046547

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