Understanding and optimization of the sensitivity of nanoscale FET-based biosensors

Kaveh Shoorideh; Chi On Chui

doi:10.1117/12.2064899

16 September 2014 Understanding and optimization of the sensitivity of nanoscale FET-based biosensors

Kaveh Shoorideh, Chi On Chui

Proceedings Volume 9174, Nanoepitaxy: Materials and Devices VI; 917413 (2014) https://doi.org/10.1117/12.2064899
Event: SPIE NanoScience + Engineering, 2014, San Diego, California, United States

Abstract

It is commonly believed that small nanowires make more sensitive bioFETs than larger nanowires and planar structures because of the high surface-area-to-volume ratio that is the result of width scaling. We believe this justification is incorrect because it ignores the effect of varying radius of curvature on Debye screening. We suggest an alternative explanation for the enhancements seen in nanowire bioFETs. Our results suggest that properly engineered large-scale structures can achieve sensitivities on par with nanowires.

Citation Download Citation

Kaveh Shoorideh and Chi On Chui "Understanding and optimization of the sensitivity of nanoscale FET-based biosensors", Proc. SPIE 9174, Nanoepitaxy: Materials and Devices VI, 917413 (16 September 2014); https://doi.org/10.1117/12.2064899

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