A novel measuring device for step gauge

Shuanghua Sun; Xueping Shen; Lingding Zou; Hongtang Gao; Xiaoyou Ye

doi:10.1117/12.2069753

21 August 2014 A novel measuring device for step gauge

Shuanghua Sun, Xueping Shen, Lingding Zou, Hongtang Gao, Xiaoyou Ye

Proceedings Volume 9283, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 92830D (2014) https://doi.org/10.1117/12.2069753
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

Combining laser interferometric comparator with high precision inductance sensor, a novel measuring device for step gauge was developed. A high precision laser interferometer system was used for a length standard; a zero-crossing trigger signal of inductance sensor output voltage was used for the aiming signal. In order to improve the measuring accuracy, several high precision sensors were installed to measure environmental parameters for compensating the laser wavelength according to the Edlén empirical equation. A rotating mechanism was designed. Two key problems, probe obstacle avoidance and aiming repeatability, were solved. Experimental analysis of the contact force and speed of influence on measuring probe repeatability, and a segmented control method of the movement speed was established. The experiment indicates that the system has a high accuracy of measurement, which can be used for contact measurement of other one dimension length standard.

Citation Download Citation

Shuanghua Sun, Xueping Shen, Lingding Zou, Hongtang Gao, and Xiaoyou Ye "A novel measuring device for step gauge", Proc. SPIE 9283, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 92830D (21 August 2014); https://doi.org/10.1117/12.2069753

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