Nanomechanical properties of solvent cast PS and PMMA polymer blends and block co-polymers

Matteo Lorenzoni; Laura Evangelio; Célia Nicolet; Christophe Navarro; Alvaro San Paulo; Francesc Perez Murano

doi:10.1117/12.2085829

27 March 2015 Nanomechanical properties of solvent cast PS and PMMA polymer blends and block co-polymers

Matteo Lorenzoni, Laura Evangelio, Célia Nicolet, Christophe Navarro, Alvaro San Paulo, Francesc Perez Murano

Proceedings Volume 9423, Alternative Lithographic Technologies VII; 942325 (2015) https://doi.org/10.1117/12.2085829
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

The nanomechanical properties of solvent cast polymer thin films have been investigated using PeakForce^TM quantitative nanomechanical mapping. The samples consisted in films of polystyrene and poly(methyl methacrylate) obtained after dewetting of toluene solution on a polymeric brush layer. As a second step, we have probed the mechanical properties of Poly(styrenen- methilmethacrylate) (PS-b-PMMA) block co-polymers (BCP) thin films randomly oriented. The measured films has a critical thickness below 50 nm and present features to be resolved of less than 42 nm. Measured surface elastic modulus obtained present a good agreement with previous literature and show how PeakForce technique could be crucial to BCP investigation predicting the mechanical stability of the different phases.

Citation Download Citation

Matteo Lorenzoni, Laura Evangelio, Célia Nicolet, Christophe Navarro, Alvaro San Paulo, and Francesc Perez Murano "Nanomechanical properties of solvent cast PS and PMMA polymer blends and block co-polymers", Proc. SPIE 9423, Alternative Lithographic Technologies VII, 942325 (27 March 2015); https://doi.org/10.1117/12.2085829

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