Accurate and fast computation of transmission cross coefficients

Ştefan Apostol; Paul Hurley; Radu-Cristian Ionescu

doi:10.1117/12.2085756

18 March 2015 Accurate and fast computation of transmission cross coefficients

Ştefan Apostol, Paul Hurley, Radu-Cristian Ionescu

Proceedings Volume 9426, Optical Microlithography XXVIII; 94261Z (2015) https://doi.org/10.1117/12.2085756
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

Precise and fast computation of aerial images are essential. Typical lithographic simulators employ a Köhler illumination system for which aerial imagery is obtained using a large number of Transmission Cross Coefficients (TCCs). These are generally computed by a slow numerical evaluation of a double integral. We review the general framework in which the 2D imagery is solved and then propose a fast and accurate method to obtain the TCCs. We acquire analytical solutions and thus avoid the complexity-accuracy trade-off encountered with numerical integration. Compared to other analytical integration methods, the one presented is faster, more general and more tractable.

Citation Download Citation

Ştefan Apostol, Paul Hurley, and Radu-Cristian Ionescu "Accurate and fast computation of transmission cross coefficients", Proc. SPIE 9426, Optical Microlithography XXVIII, 94261Z (18 March 2015); https://doi.org/10.1117/12.2085756

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