Low Thermal Expansion Polyimide Buried Ridge-Waveguide AlGaAs Laser Diode

Fumihiko Sato; Hiroshi Imamoto; Koichi Imanaka; Mikihiko Shimura

doi:10.1117/12.947385

16 August 1988 Low Thermal Expansion Polyimide Buried Ridge-Waveguide AlGaAs Laser Diode

Fumihiko Sato, Hiroshi Imamoto, Koichi Imanaka, Mikihiko Shimura

Author Affiliations +

Proceedings Volume 0945, Advanced Processing of Semiconductor Devices II; (1988) https://doi.org/10.1117/12.947385
Event: Advances in Semiconductors and Superconductors: Physics and Device Applications, 1988, Newport Beach, CA, United States

Abstract

A novel wafer processing technology to fabricate ridge-waveguide laser diode has been developed, using a low thermal expansion polyimide and an etch-back process. A low threshold current of 15mA, a high To value of 145K, and a maximum power output higher than 30mW/facet under cw operation have been achieved in a GRIN-SCH single quantum well PBR(Polyimide Buried Ridge) laser emitting at 780nm. High temperature oscillation at 1900C and To of 165K have been also obtained in a GRIN-SCH multiple quantum well PBR laser. A planar configuration in the present PBR laser is suitable for opto-electronic integration.

Citation Download Citation

Fumihiko Sato, Hiroshi Imamoto, Koichi Imanaka, and Mikihiko Shimura "Low Thermal Expansion Polyimide Buried Ridge-Waveguide AlGaAs Laser Diode", Proc. SPIE 0945, Advanced Processing of Semiconductor Devices II, (16 August 1988); https://doi.org/10.1117/12.947385

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE