The design and fabrication of common optical components lithography lens

Jiun-Woei Huang

doi:10.1117/12.2186932

17 July 2015 The design and fabrication of common optical components lithography lens

Jiun-Woei Huang

Proceedings Volume 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015); 95240P (2015) https://doi.org/10.1117/12.2186932
Event: International Conference on Optical and Photonic Engineering (icOPEN2015), 2015, Singapore, Singapore

Abstract

The design and fabrication of common optical components lithography Lens has been carried out for a 1 to 1 stepper. The specification of lens is fulfilled the 3-D lithography system as 2 micron in resolution for 1 inch x 2.8 inches system. The lens has been sophistically designed by dual path in a triplet to reduce the number of components. A single aspherical surface has been applied to reduce the aberration to diffraction limit in lens. The well-made shapes of lens have been suggested. Then, the fabrication of lens has been in the process. Finally, the optical axis of tolerance optical mechanical mountings for lens system in assembly has been analyzed, and valuable for assembly and fabrication.

Citation Download Citation

Jiun-Woei Huang "The design and fabrication of common optical components lithography lens", Proc. SPIE 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015), 95240P (17 July 2015); https://doi.org/10.1117/12.2186932

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