A new class of wide-field objectives for 3D interference microscopy

Peter J. de Groot; James F. Biegen

doi:10.1117/12.2183628

22 June 2015 A new class of wide-field objectives for 3D interference microscopy

Peter J. de Groot, James F. Biegen

Author Affiliations +

Proceedings Volume 9525, Optical Measurement Systems for Industrial Inspection IX; 95250N (2015) https://doi.org/10.1117/12.2183628
Event: SPIE Optical Metrology, 2015, Munich, Germany

Abstract

We propose a new type of interference objective that makes use of two partially-reflective beamsplitter plates arranged coaxially with the objective lens system, in an assembly that is better suited to large fields of view than the traditional Michelson design. The coaxial plates are slightly tilted to direct unwanted reflections outside of the imaging pupil aperture, providing high fringe contrast with spectrally-broadband, spatially extended white light illumination. Examples include a turret-mountable 1.4× magnification objective parfocal with high-magnification objectives up to 100×, and a dovetail mount 0.5× objective with a 34×34mm field for wide-field measurements of surface form.

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Peter J. de Groot and James F. Biegen "A new class of wide-field objectives for 3D interference microscopy", Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 95250N (22 June 2015); https://doi.org/10.1117/12.2183628

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