Surface assessment and mitigation of DUV optics

Jue Wang

doi:10.1117/12.2190684

24 September 2015 Surface assessment and mitigation of DUV optics

Jue Wang

Proceedings Volume 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V; 96280Y (2015) https://doi.org/10.1117/12.2190684
Event: SPIE Optical Systems Design, 2015, Jena, Germany

Abstract

CaF₂ is one of the foremost optical materials used in ArF excimer laser optics. Surface quality of optically finished CaF₂ plays an important role in the component’s lifetime. Several techniques were employed to assess surface quality of optically finished CaF₂ in terms of top surface and subsurface damage, resulting in subsurface-damagefree CaF₂. UV light and plasma interaction with CaF₂ surfaces were investigated. The results were discussed in terms of surface roughness and cleanness associated with surface finishing and optical coatings.

Citation Download Citation

Jue Wang "Surface assessment and mitigation of DUV optics", Proc. SPIE 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V, 96280Y (24 September 2015); https://doi.org/10.1117/12.2190684

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