Ptychographic phase retrieval method for characterizing ultra-precise ellipsoidal mirrors

Yoko Takeo; Takahiro Saito; Hidekazu Mimura

doi:10.1117/12.2195864

12 October 2015 Ptychographic phase retrieval method for characterizing ultra-precise ellipsoidal mirrors

Yoko Takeo, Takahiro Saito, Hidekazu Mimura

Proceedings Volume 9633, Optifab 2015; 96332C (2015) https://doi.org/10.1117/12.2195864
Event: SPIE Optifab, 2015, Rochester, New York, United States

Abstract

Focusing and imaging optics can be characterized by evaluating the wavefront error of the focused beam. We have bean developing a ptychographic phase retrieval method using a visible laser to measure the wavefront error. In this study, the measurement accuracy of the method is increased by improving both the phase retrieval algorithm and the experimental setup. The system is applied to the characterization of an ellipsoidal mirror used for the focusing of soft X-rays. The posture of the mirror can be measured with a resolution of 1.4 μrad. The wavefront error originating from the surface profile error can be detected with an accuracy of 0.01λ (root mean square).

Citation Download Citation

Yoko Takeo, Takahiro Saito, and Hidekazu Mimura "Ptychographic phase retrieval method for characterizing ultra-precise ellipsoidal mirrors", Proc. SPIE 9633, Optifab 2015, 96332C (12 October 2015); https://doi.org/10.1117/12.2195864

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