A pseudo optical frequency comb interferometry by an optical resonator and a high-speed swept-source for 2D single-shot tomography and profilometry

Q. T. Banh; T. Shioda

doi:10.1117/12.2211995

15 March 2016 A pseudo optical frequency comb interferometry by an optical resonator and a high-speed swept-source for 2D single-shot tomography and profilometry

Q. T. Banh, T. Shioda

Author Affiliations +

Proceedings Volume 9754, Photonic Instrumentation Engineering III; 975419 (2016) https://doi.org/10.1117/12.2211995
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

Pseudo optical frequency comb using a high-speed frequency laser scanner and an optical resonator is generated as a virtual broadband lightsource for the time-domain 2D single-shot tomography and profilometry. High-speed laser scanner (40 kHz) is realized using a broadband semiconductor optical amplifier (SOA) whose individual wavelengths are consequently picked up by a conventional grating setup and a high speed polygon mirror. The performance of the pseudo frequency comb is confirmed by a measurement of a reference step-height sample with an optical zooming operation.

Citation Download Citation

Q. T. Banh and T. Shioda "A pseudo optical frequency comb interferometry by an optical resonator and a high-speed swept-source for 2D single-shot tomography and profilometry", Proc. SPIE 9754, Photonic Instrumentation Engineering III, 975419 (15 March 2016); https://doi.org/10.1117/12.2211995

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