Super resolution nano-information recording in a new hydrazone metal complex material

Kui Zhang; Jingsong Wei; Zhimin Chen; Tao Wei; Yongyou Geng; Yang Wang; Yiqun Wu

doi:10.1117/12.2248354

12 October 2016 Super resolution nano-information recording in a new hydrazone metal complex material

Kui Zhang, Jingsong Wei, Zhimin Chen, Tao Wei, Yongyou Geng, Yang Wang, Yiqun Wu

Proceedings Volume 9818, 2016 International Workshop on Information Data Storage and Tenth International Symposium on Optical Storage; 981810 (2016) https://doi.org/10.1117/12.2248354
Event: 2016 International Workshop on Information Data Storage and Tenth International Symposium on Optical Storage, 2016, Changzhou, China

Abstract

Laser thermal lithography has been proposed for a few years, which has the advantages of breaking through the optical diffraction limit, operation in far-field and in air, and low production cost. In this paper, a new hydrazone metal complex is used as the laser thermal lithography material due to its feature of the one-step fabrication of micro/nano structure without mask and wet-etching process. Based on the laser thermal lithography method, super resolution nano-information pits are directly written on the surface of hydrazone metal complex thin films. Pits with a minimum feature size of about 79 nm are successfully obtained, which is only about 1/7 of the writing spot size. Moreover, the reactive ion etching method can be applied to transfer the pits onto a silica substrate. These results suggest the potential applications of the new material in high density optical data storage and semiconductor industries.

Citation Download Citation

Kui Zhang, Jingsong Wei, Zhimin Chen, Tao Wei, Yongyou Geng, Yang Wang, and Yiqun Wu "Super resolution nano-information recording in a new hydrazone metal complex material", Proc. SPIE 9818, 2016 International Workshop on Information Data Storage and Tenth International Symposium on Optical Storage, 981810 (12 October 2016); https://doi.org/10.1117/12.2248354

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