Poster
3 October 2022 In-situ electrical and electrochemical characteristic measurement using AFM in high temperature
Author Affiliations +
Conference Poster
Abstract
This conference presentation was prepared for the Low-Dimensional Materials and Devices 2022 conference at SPIE Optics + Photonics 2022.
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Suhan Lee, Yong-Jin Yoon, and Chee Seng Ng "In-situ electrical and electrochemical characteristic measurement using AFM in high temperature", Proc. SPIE PC12200, Low-Dimensional Materials and Devices 2022, PC122000M (3 October 2022); https://doi.org/10.1117/12.2632906
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KEYWORDS
Temperature metrology

Thin films

Convection

Electrochemical etching

Oxides

Resistance

Tungsten

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