Laser chemical processing of nanomaterials

Yoonsoo Rho; Matthew Eliceiri; Costas P. Grigoropoulos; Runxuan Li

doi:10.1117/12.3010486

11 April 2024 Laser chemical processing of nanomaterials

Yoonsoo Rho, Matthew Eliceiri, Costas P. Grigoropoulos, Runxuan Li

Proceedings Volume PC12939, High-Power Laser Ablation VIII; PC1293908 (2024) https://doi.org/10.1117/12.3010486
Event: SPIE High-Power Laser Ablation, 2024, Santa Fe, New Mexico, United States

Abstract

This presentation summarizes recent work at the Laser Thermal Laboratory on the laser chemical processing of two-dimensional (2D) layered materials and the laser-aided atomic laser etching (ALEt) of semiconductors. Spatially selective laser doping of transition metal dichalcogenides (TMDCs), reversible writing of dopant patterns in graphene and fabrication of functional devices have been accomplished. Digital self-limited etching of semiconductors has been demonstrated.

Conference Presentation

Citation Download Citation

Yoonsoo Rho, Matthew Eliceiri, Costas P. Grigoropoulos, and Runxuan Li "Laser chemical processing of nanomaterials", Proc. SPIE PC12939, High-Power Laser Ablation VIII, PC1293908 (11 April 2024); https://doi.org/10.1117/12.3010486

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available