CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume PC13020 > Article
Presentation
18 June 2024 Recent advance in development of Cr/Sc-based multilayer coatings for water window applications
Evgueni Meltchakov, Blandine Capitanio, Sébastien de Rossi, Eirini Papagiannouli, Pascal Mercere, Franck Delmotte
Author Affiliations +
Proceedings Volume PC13020, Advances in Optical Thin Films VIII; PC130200E (2024) https://doi.org/10.1117/12.3015927
Event: SPIE Optical Systems Design, 2024, Strasbourg, France
Abstract
Development of multilayer mirrors for the water window (a region between absorption edges of carbon and oxygen, from 282 to 533 eV) remains quite a challenge. Proposed 25 years ago, the Cr/Sc multilayer provides theoretical reflectivity about 60% at near-normal incidence near the Sc L2,3 edge. However, the maximum measured peak reflectance achieved so far just slightly exceeds 20%. We report on our approach to design highly reflective Cr/Sc-based multilayer coatings using a process of nitridation of chromium during deposition and adding boron carbide as a third material in the multilayer structure. We will report on our strategy of optimisation of the CrN/B4C/Sc multilayer system and discuss the main findings and results. The peak reflectance as high as 32% at 397 eV was measured with this type of coating which proves to be potentially interesting for various water window applications such as x-ray microscopy.
Conference Presentation
© (2024) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Evgueni Meltchakov, Blandine Capitanio, Sébastien de Rossi, Eirini Papagiannouli, Pascal Mercere, and Franck Delmotte "Recent advance in development of Cr/Sc-based multilayer coatings for water window applications", Proc. SPIE PC13020, Advances in Optical Thin Films VIII, PC130200E (18 June 2024); https://doi.org/10.1117/12.3015927
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 PRESENTATION
WATCH
PRESENTATION SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
KEYWORDS
Multilayers
Windows
Optical coatings
Reflectivity
Thin film coatings
Oxygen
Thin film growth
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top