In-plane monolithic microscanner with two synchronized, self-aligned flat mirrors and compliant springs

Alaa Eldin S. M. Elhady Ahmed; Mohamed A. E. Mahmoud; Diaa A. M. Khalil

doi:10.1117/1.JMM.15.1.015501

29 March 2016 In-plane monolithic microscanner with two synchronized, self-aligned flat mirrors and compliant springs

Alaa Eldin S. M. Elhady Ahmed, Mohamed A. E. Mahmoud, Diaa A. M. Khalil

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 15, Issue 1, 015501 (March 2016). https://doi.org/10.1117/1.JMM.15.1.015501

Abstract

This work proposes an architecture for a wide-angle, self-aligned, in-plane monolithic scanner fabricated using the deep reactive ion etching technology. The fabricated microscanner provides an optical scanning in-plane angle of about 86 deg and operates at the speed of 2.73 kHz. The scanning is achieved using two synchronized, flat mirrors coupled mechanically to allow for wide-angle scanning and connected through a compliant structure to allow the use of a linear comb actuator. This wide-angle, in-plane scanning opens the door for many applications, especially for handheld optical displays.

Citation Download Citation

Alaa Eldin S. M. Elhady Ahmed, Mohamed A. E. Mahmoud, and Diaa A. M. Khalil "In-plane monolithic microscanner with two synchronized, self-aligned flat mirrors and compliant springs," Journal of Micro/Nanolithography, MEMS, and MOEMS 15(1), 015501 (29 March 2016). https://doi.org/10.1117/1.JMM.15.1.015501

Published: 29 March 2016

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