Concise formula for the Zernike coefficients of scaled pupils

Augustus J.E.M. Janssen; Peter Dirksen

doi:10.1117/1.2345672

1 July 2006 Concise formula for the Zernike coefficients of scaled pupils

Augustus J.E.M. Janssen, Peter Dirksen

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 5, Issue 3, 030501 (July 2006). https://doi.org/10.1117/1.2345672

Abstract

Modern steppers and scanners have a projection lens whose numerical aperture (NA) can be varied so as to optimize the image performance for certain lithographic features. Thus a variable fraction of the aberrations is actually involved in the imaging process. In this letter, we present a concise formula for the NA scaling of the Zernike coefficients. In addition, we apply our results to the Strehl ratio.

©(2006) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Augustus J.E.M. Janssen and Peter Dirksen "Concise formula for the Zernike coefficients of scaled pupils," Journal of Micro/Nanolithography, MEMS, and MOEMS 5(3), 030501 (1 July 2006). https://doi.org/10.1117/1.2345672

Published: 1 July 2006

ACCESS THE FULL ARTICLE

JOURNAL ARTICLE
3 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY