Open Access
14 February 2024 Stabilizing high aspect ratio x-ray gratings with top layer resist grid
Michael Richter, Thomas Beckenbach, Constantin Rauch, Stephan Schreiner, Marcus Zuber, Elias Hamann, Arndt Last, Martin Börner, Jan Korvink, Pascal Meyer
Author Affiliations +
Abstract

A problem with high aspect ratio x-ray gratings, fabricated by the deep x-ray LIGA process, is the collapse of the metallic structure when the resist is removed. A unique method that consists of positioning perpendicular metal bridges on top of the grating (roof bridges) is described and tested as a solution. First, a theoretical study is carried out on the transmission loss of such grids as a function of the thickness, their spacing, their materials (gold or nickel), and the x-ray energy. Different processes with their own advantages and disadvantages are possible and described. To further satisfy the requirement of curved gratings, two processes are tested in detail: structuring the x-ray grating with a laser and planarization followed by restructuring a second resist layer. In both cases, a second electroplating step is performed. Finally, a grating with a 12 cm bending radius and stabilization is fabricated. To assess the quality of the grids, two complementary methods are used: scanning electron microscopy and angular x-ray transmission. The latter one is an innovatively developed measurement process specially dedicated to x-ray gratings. The results for the fabrication processes are discussed and rated. The stability provided by the roof bridges works as intended, although the overall quality of the grating is slightly reduced.

CC BY: © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 International License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
Michael Richter, Thomas Beckenbach, Constantin Rauch, Stephan Schreiner, Marcus Zuber, Elias Hamann, Arndt Last, Martin Börner, Jan Korvink, and Pascal Meyer "Stabilizing high aspect ratio x-ray gratings with top layer resist grid," Journal of Micro/Nanopatterning, Materials, and Metrology 23(1), 014901 (14 February 2024). https://doi.org/10.1117/1.JMM.23.1.014901
Received: 17 October 2023; Accepted: 24 January 2024; Published: 14 February 2024
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KEYWORDS
Bridges

X-rays

Gold

Scanning electron microscopy

Metals

Electroplating

Nickel

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