Three-dimensional optical metrology with extended depth-measuring range using a holographic axilens

Erez Hasman; Vladimir Kleiner

doi:10.1117/1.1524170

1 January 2003 Three-dimensional optical metrology with extended depth-measuring range using a holographic axilens

Erez Hasman, Vladimir Kleiner

Optical Engineering, Vol. 42, Issue 1, (January 2003). https://doi.org/10.1117/1.1524170

A method of 3-D optical metrology based on a triangulation system using holographic axilens to increase the depth-measuring range without any decrease in the axial or the lateral resolution is presented. The element is designed according to an analytic ray-tracing optimization approach and is recorded as a computer-generated hologram. A sixfold increase in the depth-measuring range is experimentally obtained while nearly diffraction limited light spots are completely maintained.

©(2003) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Erez Hasman and Vladimir Kleiner "Three-dimensional optical metrology with extended depth-measuring range using a holographic axilens," Optical Engineering 42(1), (1 January 2003). https://doi.org/10.1117/1.1524170

Published: 1 January 2003

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