Valve cone measurement using white light interference microscopy in a spherical measurement geometry

Peter J. de Groot; Xavier Colonna de Lega

doi:10.1117/1.1565350

1 May 2003 Valve cone measurement using white light interference microscopy in a spherical measurement geometry

Peter J. de Groot, Xavier Colonna de Lega

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Optical Engineering, Vol. 42, Issue 5, (May 2003). https://doi.org/10.1117/1.1565350

We describe an interference microscope for valve cone angle, roundness, straightness, and waviness using scanning white light interferometry. Our unusual test geometry creates a spherical optical measurement surface centered at an optical datum point that represents the center of curvature of the mating valve needle or ball. A radial scan locates intersections of the measurement surface with respect to the datum point, and software reconstructs the conical sample surface by means of a calibrated mapping function. This flexible approach accommodates a wide range of cone angles and diameters without a change of optics. Experimental results show promising performance, including a 0.02-μm standard deviation for cone roundness, including sample removal and replacement.

©(2003) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Peter J. de Groot and Xavier Colonna de Lega "Valve cone measurement using white light interference microscopy in a spherical measurement geometry," Optical Engineering 42(5), (1 May 2003). https://doi.org/10.1117/1.1565350

Published: 1 May 2003

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