7 April 2022 Optimization of stepping Mueller matrix ellipsometer configuration based on weighed factor
Zhengwei Miao, Yuanyuan Tang, Kai Wei, Yudong Zhang
Author Affiliations +
Abstract

Due to the instability of motor speeds, asynchrony in trigger systems, and mechanical factors, the use of continuous dual-rotating compensator (DRC)-Mueller matrix ellipsometer (MME) is limited. And the stepping one is more often used on an extremely wide spectrum measuring range. However, its long measuring time limits its use. To solve this problem, we propose a weighed factor to judge the stability and robustness of this ellipsometer. This factor describes the performance of ellipsometers better than the condition number. We use this factor as the merit function to optimize the configuration of a 16-point measurement system with an improved genetic algorithm (IGA). Repeated measurement experiments on SiO2 films revealed that the optimal configuration considerably increased the measurement speed, without a notable decrease in measurement precision. The findings are not only aimed at the optimization of stepping DRC-MMEs; the IGA can also be used for other multiparameter optimization issues, and the weighed factor can be applied for the parameter optimization of other MMEs.

© 2022 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2022/$28.00 © 2022 SPIE
Zhengwei Miao, Yuanyuan Tang, Kai Wei, and Yudong Zhang "Optimization of stepping Mueller matrix ellipsometer configuration based on weighed factor," Optical Engineering 61(4), 044102 (7 April 2022). https://doi.org/10.1117/1.OE.61.4.044102
Received: 8 September 2021; Accepted: 21 January 2022; Published: 7 April 2022
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Cited by 1 scholarly publication.
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KEYWORDS
Condition numbers

Optical engineering

Monte Carlo methods

Optimization (mathematics)

Polarizers

Genetic algorithms

Optical properties

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