Dr. Alan J. Fan Profile

Dr. Alan J. Fan

Application Engineer

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Author

Publications (3)

Proceedings Article | 5 April 2007 Paper

Evaluation of AIM overlay mark for thin film head application

Yi Li, Alan Fan, Gary Etheridge, Gerald Finken, Darrel Louder

Proceedings Volume 6518, 65182W (2007) https://doi.org/10.1117/12.712332

KEYWORDS: Semiconducting wafers, Overlay metrology, Oxides, Thin films, Head, Metrology, Imaging metrology, Reticles, Data modeling, Critical dimension metrology

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Proceedings Article | 16 July 2002 Paper

Comparative investigation of CD-SEM carryover effect

Anna Chernakova, Brad Miller, Thomas Boonstra, Alan Fan

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473423

KEYWORDS: Scanning electron microscopy, Photoresist materials, Polymers, Critical dimension metrology, Semiconducting wafers, Metrology, Electron beams, Diffractive optical elements, Optical alignment, Pattern recognition

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Proceedings Article | 22 August 2001 Paper

CD SEM carry-over effect investigation

Anna Chernakova, Alan Fan

Proceedings Volume 4344, (2001) https://doi.org/10.1117/12.436792

KEYWORDS: Scanning electron microscopy, Critical dimension metrology, Diffractive optical elements, Semiconductors, Photoresist materials, Statistical analysis, Process control, Electron beams, Distortion

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