Dr. Alexander D. Lopata Profile

Dr. Alexander D. Lopata

Principal Engineer at Texas Instruments Inc

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Publications (2)

SPIE Journal Paper | 1 June 1992

Accuracy of overlay measurements: tool and mark asymmetry effects

Alexander Starikov, Daniel Coleman, Patricia Larson, Alexander Lopata, William Muth

OE, Vol. 31, Issue 06, (June 1992) https://doi.org/10.1117/12.10.1117/12.56172

KEYWORDS: Semiconducting wafers, Overlay metrology, Error analysis, Optical alignment, Metrology, Distortion, Integrated circuits, Manufacturing, Chlorine, Optical lithography

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Proceedings Article | 1 June 1990 Paper

Accuracy of overlay measurements: tool and mark asymmetry effects

Daniel Coleman, Patricia Larson, Alexander Lopata, William Muth, Alexander Starikov

Proceedings Volume 1261, (1990) https://doi.org/10.1117/12.20042

KEYWORDS: Semiconducting wafers, Metrology, Astatine, Integrated circuits, Inspection, Process control, Overlay metrology, Optical alignment, Error analysis, Photoresist materials

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