Mr. Alexandru C. Fechete Profile

Alexandru C. Fechete

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Publications (2)

Proceedings Article | 5 January 2006 Paper

Comparative study of surface acoustic wave based hydrogen sensors with: InO_x/SiN_x/36° YX LiTaO₃ structure

Alexandru Fechete, Wojtek Wlodarski, Kourosh Kalantar-zadeh, Anthony Holland, Jarek Antosziewski, Saulius Kaciulis, Luca Pandolfi

Proceedings Volume 6035, 603517 (2006) https://doi.org/10.1117/12.638505

KEYWORDS: Sensors, Indium oxide, Plasma enhanced chemical vapor deposition, Magnetic sensors, Sputter deposition, Hydrogen, Thin films, Acoustics, Gas sensors, Wave sensors

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Proceedings Article | 23 February 2005 Paper

Surface acoustic wave based ozone sensor with an InOx/Si3N4/36-degree YX LiTaO3 structure

Alexandru Fechete, Samuel Ippolito, Kourosh Kalantar-Zadeh, Wojtek Wlodarski, Anthony Holland

Proceedings Volume 5650, (2005) https://doi.org/10.1117/12.582076

KEYWORDS: Sensors, Indium oxide, Silicon, Ozone, Acoustics, Sputter deposition, Thin films, Oxygen, Sensor performance, Temperature metrology

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