It is shown that for integrating control of thickness of uniform metal films along surface samples, an amplitude measuring is more promising in comparison with phase one.
It is shown that for integrating control of thickness of uniform metal films along surface samples it is possible to use low frequencies of modulation of heating radiation and relatively large sizes of laser beams, that permits to simplify registration, to reduce the requirements to accuracy of optical adjustment and to simplify mechanical stabilization of all installation to vibrations.
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