Prof. Anthony T. Beaucamp Profile

Prof. Anthony T. Beaucamp

Associate Professor

SPIE Involvement:

Author

Area of Expertise:

Light-Field , Optical Fabrication , Micro-Lens-Array , Optical Design

Websites:

Personal Website | Company Website

Publications (21)

Proceedings Article | 26 August 2024 Poster + Paper

SAG+: a chemo-mechanical shape adaptive grinding process for fast finishing of large mirrors and lenses

Ashwani Pratap, Kathryn Copson, Anthony Beaucamp

Proceedings Volume 13100, 1310042 (2024) https://doi.org/10.1117/12.3019367

KEYWORDS: Polishing, Surface finishing, Abrasives, Mirror surfaces, Surface roughness, Zerodur, Optical surfaces, Radium, Silicon, Polyurethane

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Space observation is inevitable to know about the formation of the universe and galaxies, and for imaging far objects. Therefore, astronomers always strive to build better telescopes with high resolution and stability. Methods to fabricate low-weight large-size precision telescope mirrors are being continuously developed around the globe. Material selection and processing method are two important aspects in fabricating high performance mirrors. Zerodur^TM, a nano-crystalline glass ceramic, has found wide ranging application in earth-bound and space-borne astronomical telescopes due to its near-zero thermal expansion coefficient. To finish this kind of material, Shape Adaptive Grinding (SAG) with contact type elastic abrasive tools is a viable process that achieves excellent surface roughness (Ra < 1 nm) and form error (P-V ~ 20 nm). However, the relatively high hardness of Zerodur^TM causes material removal by mechanical means to be rather low. In this paper, a new SAG+ process is proposed where cerium oxide slurry is used together with diamond based SAG tools to leverage chemo-mechanical interaction and improve the material removal rate. Cerium oxide acts as a reducing agent that destabilizes silica crystals. This allows the Si-O bond to weaken and enhances material removal during polishing. Various grades of resin bonded diamond SAG tools were used in combination with cerium oxide slurry to process lapped Zerodur^TM samples on an industrial robot. SAG+ could achieve at least 50% reduction in the polishing time while retaining similar material removal depth and surface finish. The capabilities of SAG+ were also demonstrated in pre-polishing of silicon X-ray mirror segments, whereby the surface roughness reduced by 47-62% for different grades of polishing tools. These results on robotic polishing of large mirror substrates employing proposed SAG+ technology seems a promising advancement towards sustainable manufacturing, where energy footprint can be significantly reduced by shortening the overall polishing cycle time.

Proceedings Article | 26 August 2024 Poster + Paper

Design and application of new generation micro-lens arrays (MLA) with free-form surfaces and irregular arrangement of segments

Atsushi Sasaki, Okiharu Kirino, Anthony Beaucamp

Proceedings Volume 13100, 131003R (2024) https://doi.org/10.1117/12.3018714

KEYWORDS: Light sources and illumination, Microlens array, Design, Image segmentation, Ray tracing, Finite element methods, Optical surfaces, Mathematical optimization

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Proceedings Article | 21 August 2024 Poster + Paper

Precision in motion: advances in robotic polishing of x-ray mirrors

Fadi Atallah, Kathryn Copson, Taku Yamashita, Shivam Kumar, Anthony Beaucamp

Proceedings Volume 13093, 130934Y (2024) https://doi.org/10.1117/12.3019478

KEYWORDS: Polishing, X-rays, Robotics, X-ray optics, Mirrors, Surface finishing, X-ray telescopes, Mirror surfaces, Vibration

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Proceedings Article | 15 June 2017 Paper

More steps towards process automation for optical fabrication

David Walker, Guoyu Yu, Anthony Beaucamp, Matt Bibby, Hongyu Li, Lee McCluskey, Sanja Petrovic, Christina Reynolds

Proceedings Volume 10326, 103260S (2017) https://doi.org/10.1117/12.2275231

KEYWORDS: Optical fabrication, Artificial intelligence, Metrology, Robots, Manufacturing, Optics manufacturing, Data processing, Data modeling, Polishing, Head

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Proceedings Article | 24 July 2014 Paper

Manufacture of aspherical molding dies for x-ray telescopes after ASTRO-H

Yoshiharu Namba, Anthony Beaucamp, Hironori Matsumoto, Keisuke Tamura, Yuzuru Tawara, Hideyo Kunieda, Tadayuki Takahashi

Proceedings Volume 9144, 91444F (2014) https://doi.org/10.1117/12.2055290

KEYWORDS: Polishing, Chemical vapor deposition, Silicon carbide, Coating, Silica, Mirrors, Multilayers, Surface finishing, Aluminum, Nickel

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Proceedings Article | 9 September 2013 Paper

Finishing of EUV photomask substrates by CNC precessed bonnet polisher

Anthony Beaucamp, Yoshiharu Namba, Phillip Charlton, Richard Freeman

Proceedings Volume 8880, 888018 (2013) https://doi.org/10.1117/12.2026198

KEYWORDS: Polishing, Photomasks, Extreme ultraviolet, Chemical mechanical planarization, Surface roughness, Surface finishing, Extreme ultraviolet lithography, Head, Polishing equipment, Excimers

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Proceedings Article | 7 September 2013 Paper

Development of hybrid fluid jet/float polishing process

Anthony T. Beaucamp, Yoshiharu Namba, Richard Freeman

Proceedings Volume 8838, 88380P (2013) https://doi.org/10.1117/12.2023919

KEYWORDS: Polishing, Surface finishing, Particles, Abrasives, Computational fluid dynamics, Fluid dynamics, X-ray optics, 3D modeling, Process modeling, Aspheric lenses

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Proceedings Article | 15 October 2012 Paper

Automated finishing of diamond turned dies for hard x-ray and EUV optics replication

Anthony Beaucamp, Yoshiharu Namba, Richard Freeman

Proceedings Volume 8502, 85020F (2012) https://doi.org/10.1117/12.929632

KEYWORDS: Polishing, Surface finishing, X-rays, Diamond turning, Diamond, Hard x-rays, Nickel, Space telescopes, X-ray telescopes, EUV optics

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Proceedings Article | 13 September 2012 Paper

Edge-control and surface-smoothness in sub-aperture polishing of mirror segments

D. Walker, A. Beaucamp, R. Evans, T. Fox-Leonard, N. Fairhurst, C. Gray, S. Hamidi, H. Li, W. Messelink, J. Mitchell, P. Rees, G. Yu

Proceedings Volume 8450, 84502A (2012) https://doi.org/10.1117/12.926183

KEYWORDS: Polishing, Aspheric lenses, Surface finishing, Mirrors, Telescopes, Spherical lenses, Space telescopes, Spatial frequencies, Prototyping, Optics manufacturing

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Proceedings Article | 27 September 2011 Paper

Fluid jet and bonnet polishing of optical moulds for application from visible to x-ray

Anthony Beaucamp, Richard Freeman, Akihiro Matsumoto, Yoshiharu Namba

Proceedings Volume 8126, 81260U (2011) https://doi.org/10.1117/12.905491

KEYWORDS: Polishing, Surface finishing, Diamond, Nickel, Radium, Tungsten, Aspheric lenses, Abrasives, X-rays, Optics manufacturing

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Proceedings Article | 23 July 2008 Paper

Active control of edges and global microstructure on segmented mirrors

D. Walker, A. Beaucamp, C. Dunn, R. Evans, R. Freeman, R. Morton, S. Wei, G. Yu

Proceedings Volume 7018, 701812 (2008) https://doi.org/10.1117/12.787930

KEYWORDS: Polishing, Surface finishing, Raster graphics, Zerodur, Large telescopes, Segmented mirrors, Mirrors, Radium, Infrared radiation, Microfluidics

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Proceedings Article | 18 July 2008 Paper

Removal of diamond-turning signatures on x-ray mandrels and metal optics by fluid-jet polishing

A. Beaucamp, R. Freeman, R. Morton, Karthik Ponudurai, D. Walker

Proceedings Volume 7018, 701835 (2008) https://doi.org/10.1117/12.787960

KEYWORDS: Surface finishing, Polishing, Mirrors, Aspheric lenses, X-rays, Microfluidics, Metal optics, Metals, Diffraction, Servomechanisms

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Proceedings Article | 31 August 2006 Paper

Commissioning of the first Precessions 1.2m CNC polishing machines for large optics

D. Walker, A. T. H. Beaucamp, V. Doubrovski, C. Dunn, R. Evans, R. Freeman, G. McCavana, R. Morton, D. Riley, J. Simms, G. Yu, X. Wei

Proceedings Volume 6288, 62880P (2006) https://doi.org/10.1117/12.684091

KEYWORDS: Polishing, Surface finishing, Polishing equipment, Aspheric lenses, Raster graphics, Spherical lenses, Optics manufacturing, Polyurethane, Oxides, Crystals

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Proceedings Article | 27 July 2006 Paper

Automated optical fabrication: first results from the new Precessions 1.2m CNC polishing machine

D. Walker, A. T. H. Beaucamp, V. Doubrovski, C. Dunn, R. Evans, R. Freeman, J. Kelchner, G. McCavana, R. Morton, D. Riley, J. Simms, G. Yu, X. Wei

Proceedings Volume 6273, 627309 (2006) https://doi.org/10.1117/12.671098

KEYWORDS: Polishing, Surface finishing, Astronomical imaging, Metrology, Polishing equipment, Mirrors, Spherical lenses, Computer programming, Control systems, Optical fabrication

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Proceedings Article | 20 October 2005 Paper

Recent advances in the control of form and texture on free-form surfaces

D. Walker, A. Beaucamp, V. Doubrovski, C. Dunn, R. Freeman, G. Hobbs, G. McCavana, R. Morton, D. Riley, J. Simms, X. Wei

Proceedings Volume 5965, 59650S (2005) https://doi.org/10.1117/12.625796

KEYWORDS: Polishing, Surface finishing, Metrology, Profilometers, Interferometers, Aspheric lenses, Telescopes, Mirrors, Large telescopes, Spherical lenses

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Proceedings Article | 24 August 2005 Paper

New results extending the Precessions process to smoothing ground aspheres and producing freeform parts

D. Walker, A. T. H. Beaucamp, V. Doubrovski, C. Dunn, R. Freeman, G. McCavana, R. Morton, D. Riley, J. Simms, X. Wei

Proceedings Volume 5869, 58690E (2005) https://doi.org/10.1117/12.617067

KEYWORDS: Polishing, Surface finishing, Diamond, Aspheric lenses, Abrasives, Metals, Spherical lenses, Lens grinding equipment, Interferometers, Large telescopes

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Proceedings Article | 14 October 2004 Paper

Recent developments of Precessions polishing for larger components and free-form surfaces

David Walker, Anthony Beaucamp, David Brooks, V. Doubrovski, Matthew Cassie, C. Dunn, Richard Freeman, Andrew King, M. Libert, Gerry McCavana, Roger Morton, David Riley, John Simms

Proceedings Volume 5523, (2004) https://doi.org/10.1117/12.559531

KEYWORDS: Polishing, Surface finishing, Interferometers, Aspheric lenses, Metrology, Mirrors, Interferometry, Control systems, Raster graphics, Optical spheres

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Proceedings Article | 24 September 2004 Paper

New results from the Precessions polishing process scaled to larger sizes

David Walker, Anthony Beaucamp, David Brooks, V. Doubrovski, Matthew Cassie, C. Dunn, Richard Freeman, Andrew King, M. Libert, Gerry McCavana, Roger Morton, David Riley, John Simms

Proceedings Volume 5494, (2004) https://doi.org/10.1117/12.553044

KEYWORDS: Polishing, Surface finishing, Interferometers, Mirrors, Metrology, Optical spheres, Aspheric lenses, Interferometry, Spatial frequencies, Distortion

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Proceedings Article | 22 December 2003 Paper

Precessions aspheric polishing: new results from the development program

David Walker, Anthony Beaucamp, Richard Bingham, David Brooks, Richard Freeman, Sug-Whan Kim, Andrew King, Gerry McCavana, Roger Morton, David Riley, John Simms

Proceedings Volume 5180, (2003) https://doi.org/10.1117/12.507462

KEYWORDS: Polishing, Surface finishing, Aspheric lenses, Spherical lenses, Mirrors, Metrology, Optical spheres, Zerodur, Large telescopes, Polyurethane

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Proceedings Article | 30 January 2003 Paper

Precessions process for efficient production of aspheric optics for large telescopes and their instrumentation

David Walker, A. Beaucamp, Richard Bingham, David Brooks, Richard Freeman, Sowoon Kim, Andrew King, Gerry McCavana, Roger Morton, David Riley, John Simms

Proceedings Volume 4842, (2003) https://doi.org/10.1117/12.456677

KEYWORDS: Polishing, Aspheric lenses, Surface finishing, Mirrors, Diffraction, Image segmentation, Astronomy, Large telescopes, Spherical lenses, Wavefronts

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Proceedings Article | 16 October 2002 Paper

Novel CNC polishing process for control of form and texture on aspheric surfaces

David Walker, A. Beaucamp, David Brooks, Richard Freeman, Andrew King, Gerry McCavana, Roger Morton, David Riley, John Simms

Proceedings Volume 4767, (2002) https://doi.org/10.1117/12.451322

KEYWORDS: Polishing, Surface finishing, Aspheric lenses, Process control, Raster graphics, Spherical lenses, Mirrors, Astronomy, Polishing equipment, Optical instrument design

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Showing 5 of 21 publications

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