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Atsushi Tatsugawa
at FUJIFILM Corp
SPIE Involvement:
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Publications (1)
Proceedings Article | 25 September 2010 Paper
Duplicated templates for discrete track media
Atsushi Tatsugawa, Noriko Yamashita, Tadashi Oomatsu, Kenji Saitou, Takashi Katou, Toshihide Ishioka, Kazuyuki Usuki
Proceedings Volume 7823, 78233L (2010) https://doi.org/10.1117/12.864192
KEYWORDS: Quartz, Nickel, Silicon, Servomechanisms, Nanoimprint lithography, Reactive ion etching, Ultraviolet radiation, Line width roughness, Semiconducting wafers, Photomasks
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