Dr. Cattien V. Nguyen Profile

Dr. Cattien V. Nguyen

Senior Scientist at NASA Ames Research Ctr

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Author

Publications (4)

Proceedings Article | 24 May 2004 Paper

An image stitching method to eliminate the distortion of the sidewall in linewidth measurement

Xuezeng Zhao, Joseph Fu, Wei Chu, Cattien Nguyen, Theodore Vorburger

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.536692

KEYWORDS: Atomic force microscopy, Image registration, Distortion, Carbon nanotubes, Scanning electron microscopy, Standards development, Semiconductor manufacturing, Data storage, Crystals, Oxides

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Proceedings Article | 16 July 2002 Paper

Carbon nanotube scanning probe for surface profiling of DUV and 193-nm photoresist pattern

Cattien Nguyen, Ramsey Stevens, Jabulani Barber, Jie Han, Meyya Meyyappan, Martha Sanchez, Carl Larson, William Hinsberg

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473506

KEYWORDS: Carbon nanotubes, Photoresist materials, Metrology, Atomic force microscopy, Lithography, Semiconductors, Silicon, Chemical vapor deposition, Profiling, Scanning electron microscopy

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Proceedings Article | 11 June 1999 Paper

Aerial image contrast using interferometric lithography: effect on line-edge roughness

Martha Sanchez, William Hinsberg, Frances Houle, John Hoffnagle, Hiroshi Ito, Cattien Nguyen

Proceedings Volume 3678, (1999) https://doi.org/10.1117/12.350198

KEYWORDS: Line edge roughness, Lithography, Polymers, Interferometry, Photoresist materials, Scanning electron microscopy, Image analysis, Semiconducting wafers, Chemistry, Modulation

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Proceedings Article | 1 June 1991 Paper

Smectic liquid crystals modified by tail and core fluorination

Robert Twieg, K. Betterton, Richard DiPietro, D. Gravert, Cattien Nguyen, H. Nguyen, A. Babeau, C. Destrade

Proceedings Volume 1455, (1991) https://doi.org/10.1117/12.44683

KEYWORDS: Fluorine, Liquid crystals, Carbon, Hydrogen, Halogens, Chemical species, Molecular interactions, Dielectric polarization, Dielectrics, Ferroelectric LCDs

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