Prof. Chih-Hao Chang Profile

Prof. Chih-Hao Chang

at Univ of Texas at Austin

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Publications (3)

Proceedings Article | 9 April 2024 Presentation + Paper

Manufacturing and metrology of 3D holographic structure nanopatterns in roll-to-roll fabrication

Barbara Groh, Kwon Sang Lee, Luis Arturo Aguirre, Michael Cullinan, Chih-Hao Chang

Proceedings Volume 12956, 1295609 (2024) https://doi.org/10.1117/12.3010004

KEYWORDS: Metrology, Manufacturing, Photomasks, Atomic force microscopy, 3D metrology, Lithography, Holography, Nanostructures, Control systems, Fabrication

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Proceedings Article | 21 November 2023 Poster + Paper

A study on EUV patterning with colloidal nanoparticles

Saurav Mohanty, Ethan Flores, Chih-Hao Chang

Proceedings Volume 12750, 1275011 (2023) https://doi.org/10.1117/12.2687727

KEYWORDS: Extreme ultraviolet, Nanoparticles, Extreme ultraviolet lithography, Optical lithography, Photoresist materials, Particles, Nanostructures, Lithography, Light sources, Finite-difference time-domain method

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Proceedings Article | 31 October 2022 Poster

EUV lithography using colloidal nanoparticles

Saurav Mohanty, Kun-Chieh Chien, Vijay A. Premnath, Chih-Hao Chang

Proceedings Volume PC12292, PC122920T (2022) https://doi.org/10.1117/12.2641139

KEYWORDS: Nanoparticles, Extreme ultraviolet lithography, Photoresist materials, Extreme ultraviolet, Silicon, Semiconducting wafers, Nanostructures, Nanolithography, Infrared lasers, Ultrafast phenomena

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