Dr. Chung-Yi Su Profile

Dr. Chung-Yi Su

at Broadcom Inc

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Publications (1)

Proceedings Article | 8 August 1993 Paper

Fabrication of 0.1-um T-shaped gates by phase-shifting optical lithography

Hua-Yu Liu, Chung-yi Su, Nigel Farrar, Robert Gleason

Proceedings Volume 1927, (1993) https://doi.org/10.1117/12.150465

KEYWORDS: Photomasks, Phase shifts, Optical lithography, Electron beam lithography, Field effect transistors, Electron beams, Polymethylmethacrylate, Metals, Optics manufacturing, Excimer lasers

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