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Cody Bezik
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Publications (2)
SPIE Journal Paper | 22 August 2018 Open Access
Studying the effects of chemistry and geometry on DSA hole-shrink process in three-dimensions
Chun Zhou, Tsuyoshi Kurosawa, Takahiro Dazai, Jan Doise, Jiaxing Ren, Cody Bezik, Tamar Segal-Peretz, Roel Gronheid, Paulina Rincon-Delgadillo, Akiyoshi Yamazaki, Juan de Pablo, Paul Nealey
JM3, Vol. 17, Issue 03, 031203, (August 2018) https://doi.org/10.1117/12.10.1117/1.JMM.17.3.031203
KEYWORDS: Directed self assembly, Polymethylmethacrylate, Picosecond phenomena, Tomography, System on a chip, Chemistry, Scanning transmission electron microscopy, Transmission electron microscopy, Semiconducting wafers, 3D image processing
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Proceedings Article | 19 March 2018 Paper
Studying the effects of chemistry and geometry on DSA hole-shrink process in three dimensions
Chun Zhou, Tsuyoshi Kurosawa, Takahiro Dazai, Jan Doise, Jiaxing Ren, Cody Bezik, Tamar Segal-Peretz, Akiyoshi Yamazaki, Roel Gronheid, Paulina Rincon-Delgadillo, Juan de Pablo, Paul Nealey
Proceedings Volume 10584, 105840K (2018) https://doi.org/10.1117/12.2297461
KEYWORDS: Polymethylmethacrylate, Picosecond phenomena, Directed self assembly, Tomography, Transmission electron microscopy, System on a chip, Chemistry, Semiconducting wafers, 3D metrology, Scanning transmission electron microscopy
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