Dr. Dorin Cerbu
at imec
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 10 April 2024 Presentation + Paper
M. Beggiato, D. Cerbu, R. Loo, W. Sun, A. Moussa, G. Bast, K. Fukaya, C. Beral, A.-L. Charley, N. Janardan, A. Cross, G. Lorusso, M. Isawa, A. Belmonte, G. Sankar Kar, J. Bogdanowicz
Proceedings Volume 12955, 129551F (2024) https://doi.org/10.1117/12.3011279
KEYWORDS: Semiconducting wafers, Optical inspection, Inspection, Crystals, Sampling rates, Laser phosphor displays, Superlattices, Optical testing, Defect detection, Signal processing

Proceedings Article | 10 April 2024 Presentation + Paper
D. Cerbu, V. Blanco Carballo, F. Schleicher, J. van de Kerkhove, P. Leray, N. Kissoon, E. De Poortere
Proceedings Volume 12955, 129551C (2024) https://doi.org/10.1117/12.3011142
KEYWORDS: Semiconducting wafers, Machine learning, Image processing, Design, Scanning electron microscopy

SPIE Journal Paper | 19 October 2023
Victor Blanco Carballo, Etienne De Poortere, Philippe Leray, Dorin Cerbu, Jeroen van de Kerkhove, Nicola Kissoon
JM3, Vol. 22, Issue 04, 041604, (October 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.4.041604
KEYWORDS: Metals, Design rules, Design, Critical dimension metrology, Scanning electron microscopy, Diffractive optical elements, Extreme ultraviolet, Etching, Optical lithography, Transmission electron microscopy

Proceedings Article | 28 April 2023 Presentation + Paper
Proceedings Volume 12495, 124951D (2023) https://doi.org/10.1117/12.2661138
KEYWORDS: Extreme ultraviolet lithography, Photoresist technology, Line edge roughness, Critical dimension metrology, Critical dimension scanning electron microscopy, Image processing, Signal to noise ratio, Denoising, Scanning electron microscopy, Metrology, Line width roughness, Artificial intelligence, Machine learning

Proceedings Article | 28 April 2023 Paper
Proceedings Volume 12494, 124940L (2023) https://doi.org/10.1117/12.2658306
KEYWORDS: Critical dimension metrology, Failure analysis, Random forests, Stochastic processes, Statistical analysis, Scanning electron microscopy

Showing 5 of 10 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top