Dr. Dorus Elstgeest Profile

Dr. Dorus Elstgeest

at TNO

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Author

Publications (2)

Proceedings Article | 10 April 2024 Presentation

Investigating the individual effects of hydrogen radicals and vacuum EUV photons on pellicle-like materials at varying temperatures

G. Yetik, H.H.P.Th. Bekman, T.H. Elstgeest, J. van Veldhoven, H.A. Lensen, Jetske Stortelder

Proceedings Volume PC12953, PC129530I (2024) https://doi.org/10.1117/12.3010105

KEYWORDS: Hydrogen, Extreme ultraviolet, Vacuum, Photons, Pellicles, Extreme ultraviolet lithography, X-ray photoelectron spectroscopy, Thin films, Scanning electron microscopy, Chemical analysis

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Proceedings Article | 4 November 2020 Presentation + Paper

Study of EUV reticle storage effects through exposure on EBL2 and NXE

Rik Jonckheere, Chien-Ching Wu, Veronique de Rooij-Lohmann, Dorus Elstgeest, Henk Lensen, Philipp Hönicke, Michael Kolbe, Victor Soltwisch, Claudia Zech, Frank Scholze, Remko Aubert, Vineet Nair, Eric Hendrickx

Proceedings Volume 11517, 115170Z (2020) https://doi.org/10.1117/12.2573125

KEYWORDS: Reticles, Extreme ultraviolet lithography, Photomasks, Semiconducting wafers, Ruthenium, Scanners, Contamination, Integrated circuits, Semiconductors, X-rays

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