Mr. Edmund W. Arriola Profile

Edmund W. Arriola

Principal Optical Engineer

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Publications (2)

Proceedings Article | 12 May 2005 Paper

A 157-nm immersion microstepper

M. Switkes, T. Bloomstein, M. Rothschild, E. Arriola, T. Morrison

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.602585

KEYWORDS: Lithography, Lens design, Semiconducting wafers, Photomasks, Liquids, Microfluidics, Actuators, Microfluidic imaging, Sensors, Immersion lithography

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Proceedings Article | 27 October 2003 Paper

Diamond-turning-assisted fabrication of a high-numerical-aperture lens assembly for 157-nm microlithography

Edmund Arriola

Proceedings Volume 5176, (2003) https://doi.org/10.1117/12.503765

KEYWORDS: Diamond turning, Adhesives, Assembly tolerances, Actuators, Deep ultraviolet, Diamond, Tolerancing, Manufacturing, Optical lithography, Silica

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