Dr. Farzad Farhadzadeh Profile

Dr. Farzad Farhadzadeh

Design engineer at ASML Netherlands BV

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Author

Publications (6)

Proceedings Article | 22 February 2021 Presentation + Paper

Characterization of metrology to device overlay offset and novel methods to minimize it

Kaustuve Bhattacharyya, Ken Chang, Jeff Lin, Simon Mathijssen, Marc Noot, Farzad Farhadzadeh, Arie Den Boef, Momo Lin, Frank Sun, Justin Huang, Sax Liao, Edison Wang, Jason Hung, Benny Gosali, Wilson Liu, Cathy Wang, Matthew Mclaren

Proceedings Volume 11611, 116110C (2021) https://doi.org/10.1117/12.2583861

KEYWORDS: Overlay metrology, Metrology, Etching, Data modeling, Model-based design, Measurement devices, Lithography

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Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Accuracy aware pixel selection in multi-wavelength uDBO metrology enables higher robustness and accuracy for DRAM

Chia Hung Chen, Sheng-Tsung Tsao, Jie Du, Wenkang Song, Hongwei Zhu, Ji-Ling Hou, Longfei Shen, Sunny Xia, Simon Mathijssen, Marc Noot, Farzad Farhadzadeh, Kimi Yang, Xing Ma, Zhi-Qiang Tang, Jing Wang, Yu Liu, David Xu, Herman Heijmerikx, Eason Su, Elliott Mc Namara, Kaustuve Bhattacharyya

Proceedings Volume 11611, 116112Z (2021) https://doi.org/10.1117/12.2583818

KEYWORDS: Metrology, Overlay metrology, High volume manufacturing, Front end of line, Detection and tracking algorithms

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Proceedings Article | 20 March 2020 Paper

Enhancing the applications space of diffraction based overlay metrology by increasing throughput and target pitch flexibility

Simon Mathijssen, Herman Heijmerikx, Farzad Farhadzadeh, Marc Noot, Lineke van der Sneppen, Longfei Shen, Fei Jia, Jolly Xu, Huajun Qin, Arie den Boef, Elliott Mc Namara, Kaustuve Bhattacharyya, Chao Fang, Yaobin Feng

Proceedings Volume 11325, 113252L (2020) https://doi.org/10.1117/12.2551899

KEYWORDS: Diffraction, Overlay metrology, Metrology, Diffraction gratings, Semiconducting wafers, Polarization, Silicon, Detection and tracking algorithms

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Proceedings Article | 20 March 2020 Presentation + Paper

Taking the multi-wavelength DBO to the next level of accuracy and robustness

Jinsun Kim, Jeongijn Lee, Chan Hwang, Seung Yoon Lee, Wooyoung Jung, Joonsoo Park, Kaustuve Bhattacharyya, Arie den Boef, Simon Mathijssen, Marc Noot, Farzad Farhadzadeh, Daniel Park, Kaustubh Padhye, Se-Ra Jeon, Seung-Bin Yang, Won-Jae Jang, Oh-Sung Kwon

Proceedings Volume 11325, 113251J (2020) https://doi.org/10.1117/12.2551676

KEYWORDS: Overlay metrology, Semiconducting wafers, Calibration, Metrology, Diffraction gratings, Polarization, Optical testing, Etching, Electronics, Optical lithography

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Proceedings Article | 19 February 2014 Paper

On accuracy, robustness, and security of bag-of-word search systems

Svyatoslav Voloshynovskiy, Maurits Diephuis, Dimche Kostadinov, Farzad Farhadzadeh, Taras Holotyak

Proceedings Volume 9028, 902807 (2014) https://doi.org/10.1117/12.2038149

KEYWORDS: Visualization, Databases, Information security, Computer programming, Binary data, Systems modeling, Phase modulation, Statistical analysis, Statistical modeling, Computing systems

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Proceedings Article | 11 February 2011 Paper

Private content identification based on soft fingerprinting

Sviatoslav Voloshynovskiy, Taras Holotyak, Oleksiy Koval, Fokko Beekhof, Farzad Farhadzadeh

Proceedings Volume 7880, 78800M (2011) https://doi.org/10.1117/12.872524

KEYWORDS: Signal to noise ratio, Binary data, Lead, Databases, Data hiding, Computer programming, Reliability, Data modeling, Berkelium, Computer security

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Showing 5 of 6 publications

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