Freeman Sung
at Photronics, Inc.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 1 December 2022 Poster + Paper
Young Ham, Tooru Suzuki, Akira Uchida, Kei Kurebayashi, Freeman Sung, Robert Bendernagel, Myung Yong Kim, Chris Progler
Proceedings Volume 12293, 122930S (2022) https://doi.org/10.1117/12.2644329
KEYWORDS: Photomasks, Lithography, Manufacturing, Glasses, Transmittance, Quartz, Inspection, Fused quartz, Optical lithography, Optics manufacturing

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