Dr. Göksel Durkaya Profile

Dr. Göksel Durkaya

SPIE Involvement:

Author

Publications (4)

SPIE Journal Paper | 27 October 2021

Development of an optical measurement system for surface depth measurements and study of focus effect on determination of steel inclusion content by EN-10247

Goksel Durkaya, Huseyin Kurtuldu, Baris Çetin, Burak Bal

OE, Vol. 60, Issue 10, 103104, (October 2021) https://doi.org/10.1117/12.10.1117/1.OE.60.10.103104

KEYWORDS: Optical testing, Objectives, Optical engineering, Inspection, Surface finishing, Metals, Cameras, Manufacturing, Laser scattering, Interferometers

Read Abstract +

Proceedings Article | 8 November 2012 Paper

Effect of radiation exposure on the surface adhesion of Ru-capped MoSi multilayer blanks

Göksel Durkaya, Abbas Rastegar, Hüseyin Kurtuldu

Proceedings Volume 8522, 852214 (2012) https://doi.org/10.1117/12.976060

KEYWORDS: Particles, Radiation effects, Ruthenium, Surface roughness, Extreme ultraviolet, Photomasks, Extreme ultraviolet lithography, Ions, Neodymium, Lamps

Read Abstract +

Proceedings Article | 23 March 2012 Paper

Effect of radiation on the defectivity and stability of Ru-capped MoSi multilayer blanks

Abbas Rastegar, Göksel Durkaya, Aron Cepler, Matt House, Steve Novak

Proceedings Volume 8322, 832211 (2012) https://doi.org/10.1117/12.916631

KEYWORDS: Ruthenium, Silicon, Extreme ultraviolet, Extreme ultraviolet lithography, Reflectivity, Photomasks, Oxides, Radiation effects, Scanning probe microscopy, Oxidation

Read Abstract +

Proceedings Article | 18 August 2009 Paper

Optical and structural properties of InN grown by HPCVD

M. Buegler, M. Alevli, R. Atalay, G. Durkaya, I. Senevirathna, M. Jamil, I. Ferguson, N. Dietz

Proceedings Volume 7422, 742218 (2009) https://doi.org/10.1117/12.828163

KEYWORDS: Indium nitride, Raman spectroscopy, Crystals, Sapphire, Chemical vapor deposition, Luminescence, Sensors, Gallium nitride, X-ray diffraction, Chemical analysis

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years