CONFERENCE PROCEEDINGS
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Hao Wang
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Publications (3)
Proceedings Article | 10 April 2024 Presentation + Paper
Advanced processing control for wafer-to-wafer hybrid bonding
Nikhil Aditya Kumar Roy, Richard Housley, Dan Engelhard, Hao Wang, Cassie Bayless, Chris Nguyen, Franz Zach, Shubham Badjate, Abhishek Gottipati, Yoav Grauer, Oren Ben-Nun, Roie Volkovich
Proceedings Volume 12955, 129551Q (2024) https://doi.org/10.1117/12.3010036
KEYWORDS: Wafer bonding, Overlay metrology, Semiconducting wafers, Process control, Metrology, 3D metrology, Optical parametric oscillators, Advanced process control, 3D acquisition, Distortion
Proceedings Article | 10 April 2024 Presentation + Paper
Small pitch overlay imaging metrology targets for tight OPO control
Nikhil Aditya Kumar Roy, Richard Housley, Suresh Kumar, Ranga Reddy, Dan Engelhard, Hao Wang, Atsushi Miyafuji, Toshiharu Nishiyama, Yoel Feler, Diana Shaphirov, Mark Ghinovker, Ido Ashuah, Yoav Grauer, Yonglei Li
Proceedings Volume 12955, 129551V (2024) https://doi.org/10.1117/12.3009769
KEYWORDS: Overlay metrology, Semiconducting wafers, Light sources and illumination, Metrology, Imaging metrology
Proceedings Article | 10 April 2024 Presentation + Paper
Advanced FTIR optical modeling for hydrogen content measurements in 3D NAND cell nitride and amorphous carbon hard mask
Proceedings Volume 12955, 129550H (2024) https://doi.org/10.1117/12.3010524
KEYWORDS: Hydrogen, FT-IR spectroscopy, Semiconducting wafers, Silicon nitride, Absorbance, Wafer bonding, Modeling, Amorphous carbon, Deconvolution, Chemical analysis
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